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A 440 MHz wireless and passive surface acoustic wave (SAW) based micro-sensor was developed on a 41deg YX LiNbO3 piezoelectric substrate for simultaneous measurement of CO2 and NO2. The developed sensor consists of a SAW reflective delay lines structured by an interdigital transducer (IDT), ten reflectors, CO2 sensitive film (Teflon AF 2400), and NO2 sensitive film (Indium Tin Oxide). The coupling...
We developed a 440 MHz surface acoustic wave wireless gas senor for CO2 detection and wireless measurement system. The sensor consists of a SAW reflective delay line structured by single phase unidirectional transducers (SPUDTs) and three shorted grating reflectors, and a Teflon AF 2400 thin film sensitive to CO2 gas deposited onto substrate between reflectors. The fabricated SAW device was wirelessly...
This paper presents optimal design on wireless pressure micro-sensor based on surface acoustic wave (SAW) reflective delay line. Using the coupling-of-modes (COM) analysis, the device was simulated, and the effect of reflector configuration and interdigital transducer (IDT) structure on the performance of the devices was studied. From the COM simulation results, a 440MHz SAW-based pressure sensor...
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