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In this study, two series of CdTe thin films were prepared by magnetron sputtering and analyzed in-situ using real time spectroscopic ellipsometry (RTSE). One series consists of CdTe thin films deposited at substrate temperatures ranging from 188°C to 304°C at a fixed Ar sputtering pressure of 18 mTorr, and the other consists of films deposited at pressures ranging from 2.5 to 50 mTorr at a fixed...
Real time, in situ, and ex situ spectroscopic ellipsometry (SE) methods have been applied in systematic studies of the structure and optical properties of polycrystalline CdTe and CdS thin films deposited by rf magnetron sputtering. The goal of this ongoing research is to establish a basic understanding of the relationships between the physical and optical properties, including how the void fraction,...
Ex-situ spectroscopic ellipsometry (SE) has been advanced for the determination of the optical structure of CdTe solar cells on transparent conducting oxide (TCO) coated glass superstrates. SE measurements directly through the top glass are performed using a method in which the reflection from the glass/film-stack interface is collected whereas the reflection from the ambient/glass interface is blocked...
Real time spectroscopic ellipsometry (RTSE) has been applied to characterize process-property relations in polycrystalline CdTe films prepared to 3000 Aring by magnetron sputtering under conditions similar to those yielding 14%-efficient solar cells. In this study, the key process variable is the deposition temperature (T: 188lesTles304 degC), which was calibrated in situ from the CdTe E0 band gap...
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