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Dynamic 3-D nano-scale surface profilometry using stroboscopic interferometry was successfully developed. An optical microscopy based on stroboscopic interferometry was developed to achieve full-field vibratory out-of-plane surface profilometry and system characterization. To increase the measurement bandwidth of the developed system, an innovative image processing algorithm based on deconvolution...
Commercialization of microelectromechanical systems (MEMS) has made accurate dynamic characterization a major challenge in design and fabrication. In view of this need, a dynamic 3-D surface profilometer involving white light interferometric scanning principle with a stroboscopic LED light source was developed. The developed instrument was applied to a microcantilever beam used in atomic force microscopy...
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