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In this paper, PZT film has been deposited on Ti substrate by using a hydrothermal method. The hydrothermal reaction solution was stirred by 2 types of methods. One mixing method was a rotation mixing method and the other was an ultrasonic vibration mixing method. Bimorph actuators were fabricated and evaluated with displacement measurement. Because of holding the autoclave, the ultrasonic vibration...
Optical actuators are effective for a miniaturization of micro devices because those actuators can be driven by non-contact energy supply. PLZT is a ferroelectric material which has a photostrictive effect. In this study, a PLZT polycrystalline film has been deposited on a titanium substrate by using a hydrothermal method. The characteristics of the PLZT film have been evaluated. PLZT film actuators...
In this paper, an improved touch probe sensor device for higher sensitivity and low contact force is reported. In order to improve the resolution, we have evaluated the sensitivity and fabricated a miniaturized sensor. The sensor transducer was 3 mm long and had higher resonance frequency. The resonance frequency of the vibrator was 937 kHz. Evaluated sensitivity was 1.0x10 -1 mV/nm....
The deposition processes of PZT thin films have been described in many reports, yet there have been no descriptions of the performance of PZT films at high intensity operation. Hydrothermally-deposited PZT film transducers were examined at large vibration amplitude levels at resonance frequencies. It was demonstrated that the hydrothermal PZT film expresses superior performance with regard to linearity...
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