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Mn + irons were implanted to n-type Ge(111) single crystal at room temperature with an energy of 100keV and a dose of 3x10 16 cm -2 . Subsequently annealing was performed at 400 o C for 1h under flowing nitrogen gas. X-ray diffraction measurements show that as-implanted sample is amorphous and the structure of crystal is restored after annealing. Polycrystalline...
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