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The knowledge of tribological properties of silicon is important due to its potential application for micromechanical devices. The present work focuses on the friction and wear studies of single crystal silicon (100) implanted with carbon and nitrogen at 60 keV. These tests were performed using a pin-on-disc (POD) apparatus with a 52100 pin, under contact stress of 225 MPa and at 35% relative humidity...
Diamond-like carbon (DLC) films have been deposited on dissimilar substrates using three different deposition processes. Two well-studied deposition methods, employing cathodic arcs and r.f. plasma self-bias, have been used. These two processes differ in that cathodic arc processes use gas pressures less than 1 mTorr (0.13 Pa) and deposit atomic ions with energies less than 100 eV, while r.f. plasma...
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