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Multi-cluster tools are highly productive yet expensive wafer fabricating facility in semiconductor industry. Current competitive business trend requires high-mix and low-volume production of wafers. The size of a wafer lot is becoming smaller and wafer lots change more frequently. This brings up with many start-up and close-down processes. It is thus more and more important to control these transient...
It is very challenging to obtain a one-wafer cyclic schedule for the widely used multi-cluster tools in semiconductor manufacturing. This work studies the scheduling problem for a single-arm tree-like multi-cluster tool that is process-dominant. A resource-oriented Petri net (PN) model is developed to describe its operation behavior by explicitly modeling robot waiting. Based on it, sufficient and...
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