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A new TXRF instrument combined with micro‐XRF analytical technique was proposed. An X‐ray micro‐beam was obtained by using a polycapillary X‐ray lens. The evaluated diameter of the X‐ray beam at the focal distance was 35 μm. In order to satisfy the total reflection condition of the present instrument, we attempted to cut the X‐ray micro‐beam above the critical angle of the total reflection with a...
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