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The rapid growth of communication systems demand for wide tunable low loss microwave components. Barium strontium titanate (BST) voltage dependent permittivity has shown a great potential impact for the fabrication of frequency agile components. In this work, BST interdigital capacitor (IDC) on silicon substrate exhibiting high tunability at low bias voltages is presented. The interdigital capacitor...
Oriented PZT thin films with Zr/Ti ratio of 60/40 were prepared using a multi-target R.F. sputtering system. The films were (100) or (111) oriented when grown on Pt/TiO 2 /SiO 2 /Si and exhibited c-axis epitaxial microstructure when deposited on Pt/MgO. Electrical measurements were performed in order to investigate the fatigue properties of the films. Fatigue characteristics of the...
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