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Summary form only given. We will present experimental and numerical investigations on the plasma physics dominating generation and transport of in-band (2% bandwidth) 13.5 nm EUV emission in laser- produced Sn-based plasmas. Atomic data for Sn at the temperature (30-60 eV) of interest to 13.5 nm EUV emission generation, have rarely been benchmarked by experiment. Plasma physics of the EUV Sn plasmas,...
Summary form only given. The ion energy and charge state spectrum far away from a laser produced plasma source is investigated with an electrostatic ion analyzer (EIA) probe. The effects of the wavelength of the pump laser are observed by using both a Nd:YAG laser with 1 mum wavelength, and a CO2 laser with 10.6mum wavelength to irradiate a planar Sn target. For both pump lasers, the additional laser...
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