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The basic structure of MEMS millimeter-wave phase shifters was consisted of a coplanar waveguide (CPW) transmission line periodically loaded with several thin metallic membranes. A new method was developed to obtain lower-loss microwave coplanar waveguide (CPW) by means of forming porous silicon (PS) on low-resistivity silicon wafer. The CPW fabricated on porous silicon (PS)/oxidated porous silicon...
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