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The numerical model of ionization in the plasma ion source taking the electron impact and Penning effect into account is presented. The influence of the Penning effect on the ionization efficiency is under investigation - it is shown that the carrier gas could improve ionization efficiency several times compared to the pure electron ionization case. Changes of the yield from the Penning ionization...
The experimental measurements and computer simulation results of the intensity of the Ar + ion current emitted from the hollow cathode ion source as a function of extraction voltage are presented in the paper. The computer simulations of the phenomena inside the ion chamber and ion beam formation were done using modified version of the TRQR code based on particle-in-cell (PiC) method. The...
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