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The problem of feedback control of microstructure during thin film growth is addressed. The issue of the non-availability of closed form dynamic models for the evolution of microstructure is addressed by deriving a low-order state-space model that approximates the underlying kinetic Monte Carlo model. Initially a finite set of "coarse" observables is identified from spatial correlation functions...
We identify a minimum set of "coarse" spatially invariant parameters that accurately describe the dominant behavior of the deposition surface during thin-film growth under adsorption and surface diffusion. We demonstrate, through kMC simulations, that different deposition surfaces constructed through a stochastic reconstruction procedure, with identical values for these parameters, exhibit...
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