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In this paper, a method is presented to detect the different phases of epoxy cross‐linking process and the subsurface structures of SU‐8 thin films by atomic force acoustic microscopy (AFAM). The AFAM imaging of SU‐8 thin films was investigated under different exposure and bake conditions. Optimized conditions were obtained for the cross‐linking of SU‐8 thin film at the exposure does of eight laser...
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