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Future neutrino physics experiments intend to use unprecedented volumes of liquid argon to fill a time projection chamber in an underground facility. To increase performance, integrated readout electronics should work inside the cryostat. Due to the scale and cost associated with evacuating and filling the cryostat, the electronics will be unserviceable for the duration of the experiment. Therefore,...
Future neutrino physics experiments intend to use unprecedented volumes of liquid argon to fill a time projection chamber in an underground facility. To increase performance, integrated readout electronics should work inside the cryostat. Due to the scale and cost associated with evacuating and filling the cryostat, the electronics will be unserviceable for the duration of the experiment. Therefore,...
This paper reports a novel method for nanofabrication utilizing the hybrid of energetic ion induced fluidization and stress. In the method, large-area irradiation of focused ion beam (FIB) on suspended film structures such as clamped-clamped cantilevers is adopted. The ion (such as Ga+) bombardment causes sputtering, fluidization and stress introducing to the target materials. These effects work together...
This paper reports a parylene-coated nMOSFET (n-type metal-oxide-semiconductor field-effect transistor)-embedded cantilever, which is suitable for the detection of chemical or biological molecules in liquid phase based on the surface stress sensing principle. The silicon cantilevers are configured along <;110> direction, and the channels of the embedded-nMOSFETs are perpendicular to the cantilevers...
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