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This paper reports a three-step fabrication method for highly ordered silica nanowire bunch arrays of diversiform shapes. After patterning of organic polymers on Si substrates through photo lithography, oxygen plasma bombardment is applied to fabricate nanowire bunch arrays. On one hand, oxygen plasma exploits Si source from the substrates, and, subsequently, the gaseous Si react with active oxygen...
We present a model and applications analysis of the switching characteristic of electrolyte-oxide-semiconductor (EOS) structure diodes. The EOS structure consists of a heavily-doped silicon layer, an SiO2 layer, and an electrolyte-solution layer, and exhibits diode characteristics when a sweeping voltage is applied. A conduction model of the switching characteristic of EOS diodes is suggested, and...
We report a novel microfluidic surface-enhanced Raman scattering (SERS) device, which is achieved by bonding a polydimethylsiloxane cap with a microchannel structure onto an SERS-active substrate composed of noble-metal covered silicon nanopillar forests. The silicon nanopillar forests are fabricated by using nanomaterial dots, which are introduced in oxygen-plasma bombardment of photoresist, as etching...
A new CuxSiyO resistive memory, which is different from Cu-doped SiO2 or CuxO binary oxide, is integrated successfully in standard logic technology for the first time. Key breakthrough is that data retention (10 years@ 150°C), resistance distribution (with 50x window@125°C ) and disturbance immunity significantly improved with integration simplicity advantage, as demonstrated on a 1Mb test chip. The...
This paper reports a parylene-coated nMOSFET (n-type metal-oxide-semiconductor field-effect transistor)-embedded cantilever, which is suitable for the detection of chemical or biological molecules in liquid phase based on the surface stress sensing principle. The silicon cantilevers are configured along <;110> direction, and the channels of the embedded-nMOSFETs are perpendicular to the cantilevers...
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