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Cu2ZnSn(S, Se)4 (CZTSSe) is emerged as a promising material because of non-toxic, inexpensive and earth abundant more than Cu(In, Ga)Se2. The highest conversion efficiency of CZTSSe is 11.1 % at IBM based on hydrazine process [1]. We have achieved CZTSSe thin-film solar cell 8% conversion efficiency by sputtering process. CZTSSe thin-films show different efficiency depending on selenization process...
For the first time, Ge CMOS with all thermal processes performed by microwave annealing (MWA) has been realized. The full MWA process is under 390 oC. It significantly outperforms conventional rapid thermal annealing (RTA) process in 3 aspects: (1) Diffusion-less junction: for easily diffused n-type dopant, phosphorous (P), the ion implantation dopant profile after the MWA activation process remains...
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