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In this work, both the structural and ultraviolet photosensitive properties of amorphous InGaMgO thin film were in-depth investigated. It was found the transmittance of InGaMgO thin film was as high as nearly 90% in the visible spectra region, leading to a large bandgap over 3.5 eV. In addition, it was revealed the treatment of post deposition annealing in oxygen can effectively improve the ultraviolet...
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