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This paper presents a new Phononic Crystal (PnC) resonator design in which a tapered PnC is used to confine a 970 MHz SAW resonance in a GaN-on-Si platform. Like other SAW resonator designs, the proposed resonator eliminates the release step common to most MEMS devices, leading to higher yield and simpler design and packaging. However, the use of a tapered PnC reflector in this work (Fig. 1) reduces...
In this work, we present the first fully unreleased Micro-Electro-Mechanical (MEM) resonator. The 1st harmonic longitudinal resonance of a silicon FinFET fully clad in SiO2 is demonstrated. The device exhibits two resonances at 39 and 41 GHz, corresponding well with simulation results. The quality factor (Q) of 129 at 39 GHz is ~4× lower than that of its released counterpart. Methods to improve Q...
A new linearity improvement technique for a CMOS active resistor will be presented, using an anti-parallel connection of two quasi-identical active resistor structures, different biased and opposite excited. The second-order effects that affect the MOS transistor operation will be also taking into account, the proposed linearization method compensating also the linearity degradation imposed by these...
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