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The design and characterization of a CMOS-MEMS variable capacitor is presented. Measured results demonstrate a tuning ratio of 6.9:1, a quality factor of 28 at 3 GHz, and a self-resonant frequency of 11 GHz, with sub-50 fF parasitic capacitance. Simulations of two frequency-reconfigurable circuits, a low-noise amplifier and a power amplifier, show the importance of low parasitic capacitance for practical...
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