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Post thermal and plasma treatments are used to improve the morphology, optical and electrical properties of ZnO:Al (AZO) films prepared by DC-sputtering at room temperature. H-plasma treated sample exhibits the biggest surface roughness (Root Mean Square, RMS) of 6nm in all the samples. All the films show high transmittance above 90% in 400–800nm visible range. The ∼0.20eV blue-shift of the band gap...
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