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For MEMS sensors with movable planar components, the gas damping structure can be used to reduce the oscillation of sensing structure and tune the quality factor of the dynamic system, furtherly improve the performance of these sensors. This paper deals with the application of two main gas damping structure: parallel plate and perforated plate in MEMS sensors. The dynamic behavior prediction of such...
Smart materials and flexible components are the major elements of modern robotic manipulator structure. Smart materials whose characteristics can be made to change rapidly by some external influences are often used to augment the basic actuator movements or coupling forces from one part of a system to another. Flexible components provide higher operation speed, larger work space and better maneuverability...
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