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The structural and electrical properties of SrTa 2 O 6 (SrTaO)/n-In 0.53 GaAs 0.47 (InGaAs)/InP structures where the SrTaO was grown by atomic vapor deposition, were investigated. Transmission electron microscopy revealed a uniform, amorphous SrTaO film having an atomically flat interface with the InGaAs substrate with a SrTaO film thickness of 11.2nm. The amorphous...
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