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This paper presented a novel 0–3 kPa piezoresistive pressure sensor with high sensitivity and linearity. A shuriken-structured diaphragm (SSD) is designed for the first time to solve the conflict between the sensitivity and linearity for piezoresistive pressure sensors. A trade-off between the stress on the diaphragm edge and the deflection of the diaphragm was achieved by this SSD design according...
A novel high-sensitivity pressure sensor with peninsula structured diaphragm was designed to avoid the nonlinearity problem in the area of low pressure sensing. Finite element analysis (FEA) was applied to optimize the sensor design. Sensitivity was improved by nearly 40% by the optimization of piezoresistors in the peninsula. The proposed design exhibited high linearity and high sensitivity synthetically...
The piezoresistive pressure sensor has been used to measure the dynamic pressure as well as in high temperature environment. In this paper, a novel TSV 3D packaged pressure sensor is proposed for high temperature environment and dynamic measurement. The pressure sensors and the silicon carrier with TSV are flip chip bonded using Au/Sn eutectic for hermetic encapsulation. In order to reduce the stress...
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