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Abstract- We designed a vector sensor for sensing magnetic fields by using a 3-dimensional (3D) scanning superconducting quantum interference device (SQUID) microscope. A vector senor consists of three SQUID sensors, which are fabricated on the same chip and each SQUID sensor has a pick-up coils for X, Y, Z directions. Three coils with readout circuits are configured in orthogonal with each other...
We propose a novel system of a 3-D scanning superconducting quantum interference device (SQUID) microscope with high sensitivity for magnetic fields and high spatial resolution. Our 3-D scanning SQUID microscope consists of an $X\!Y\!Z$ piezo-driven scanner for controlling the position of the pickup coils, three SQUID sensors, and the three-channel SQUID electronics at room temperature. Three SQUID...
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