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This article presents the investigation of millimetre wave extended interaction oscillation (EIO) using both pencil and sheet-shaped pseudospark (PS)-sourced electron beams. A W-band (75–110 GHz) pencil beam Extended Interaction Oscillator (EIO) was designed and constructed to operate for the first experiment with the output power of 38 W achieved from a four-gap PS discharge operating at 30.5 kV...
This article presents the investigation of a millimetre-wave extended interaction oscillation using both pencil and sheet-shaped pseudospark (PS)-sourced electron beams. Two W-band (75–110 GHz) pencil and sheet beam extended interaction oscillators (EIO) were designed and constructed respectively. The PS-sourced pencil beam EIO structure was firstly driven by a four-gap PS discharge operating at 30...
This article presents the investigation of millimeter wave extended interaction oscillation using both pencil and sheet-shaped pseudospark (PS)-sourced electron beams. A W-band (75–110 GHz) pencil beam extended interaction oscillator (EIO) was designed and constructed. In the first experiment the output power of 38 W was achieved from a four-gap PS discharge operating at 30.5 kV. PS-sourced beam generation...
High quality intense electron beams play an important role in high power millimeter-wave and terahertz radiation generation. To this end, the pseudospark-sourced electron beam has been investigated with their applications in different beam-wave interaction structures. Different structures have been designed and modelled using the particle-in-cell codes MAGIC and CST Particle Studio. The experimental...
Plasma processing of porous órgano-silicate Iowie dielectrics, following the damascene approach. remains one the biggest challenge for IC manufacturing. During low-k plasma etching. reactive radicals (O∗, F∗ amongst others) and VUV penetrate easily into the porous low-k structure, reacting with Si-CH3 terminating bonds, ultimately turning the etched low-k hydrophilic and raising the integrated k-value...
A one-dimensional fluid model has been used in this paper for studying the characteristics of energy and angular distributions of electrons and heavy particles under the one-atmosphere pressure coupled by dual-frequency excitations. Using the current balance equation instead of poisson equation for solving the electric field equation. The results show that: the high-frequency source determines the...
Pseudospark (PS) electron beams of outstanding performance have been studied recently with their application to a demanding field of millimeter-wave and terahertz radiation generation. To this end, the PS discharge process itself has been studied and millimeter wave sources which utilize a PS sourced electron beam in different beam-wave interaction structures have been designed and modelled using...
A prototype of pulse-width-modulated plasma sound source with four independent outputs has been designed and tested, in which the main circuit includes a switched DC source for realizing effective capacitor charging and four independent discharging units for pulse forming. Each two outputs are isolated by high voltage diodes connected both at the two terminals of energy storage capacitors. The maximum...
The pseudospark discharge is a form of low-pressure gas discharge capable of generating extremely high currents with short rise times by means of a unique hollow cathode structure [1-6]. A high-quality electron beam is generated during the later phases of the discharge process, which possesses high current density and brightness, as well as the ability to self-focus via ion channel focusing. This...
Cold test results of a G-band sheet beam backward wave oscillator (BWO) with a double grating waveguide, fabricated by wire cutting and a 3D printing technique, are presented in this paper. The dispersion curve and S-parameters of the BWO slow wave circuit and Bragg reflector were measured and the results compared to the numerical modelling and analytical theory.
A quasi-optical corrugated horn has been constructed for a W band gyro-TWA1,2 based on a cusp electron beam source3–5 with a helically corrugated interaction region6–8. The design is intended to provide an effective method to decouple the radiation and the beam so that a depressed collector energy recovery system may be used9–11. The horn converts a cylindrical TE11 mode into a free-space TEM00 mode...
In this work we integrate an advanced k=2.3 spin-on polymer at 40nm ½ pitch. K-value restoration techniques are investigated and complete k-value restoration is demonstrated using an in-situ HeH2 plasma. An EUV compatible stack and a dielectric dual hard mask scheme is developed to pattern trenches with good uniformity and low litho-etch bias. The impact of scaling the dielectric spacing and of direct...
The experimental demonstration of a gyrotron backward wave oscillator (gyro-BWO) using a cusp electron gun and helically corrugated waveguide will be presented. Operating in the W-band frequency range the gyro-BWO is predicted to output ~10 kW with a frequency tuning range of 85-104 GHz at 18% electronic efficiency before the energy recovery. The annular axis-encircling electron beam has been experimentally...
Experiments of photoionized plasmas and shock wave generation, which are related to laboratory astrophysics, have been performed with the Shengguang II laser facility. Some preliminary results are presented in this paper.
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