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The suspended waveguide MSM (metal-semiconductor-metal)-photodetector for visible light is designed and fabricated directly based on silicon substrate due to the fact that the SU-8 ridge waveguide has a low absorption loss and the silicon can work as active material during visible light range. An intermediate layer between waveguide and silicon has been adopted to protect the electrode during wet...
A simple and effective technique was developed to improve the nanoscale silicon waveguide fabrication. 40 nanometer features with smooth and vertical sidewall are demonstrated. With this technique, nanoscale silicon grating coupler was obtained.
The research progress in nano optoelectronic devices and their integration at Wuhan National Laboratory for Optoelectronics are summarized. Integrations on different material platforms are described, but emphasis is given to new micro/nano scale emitters, detectors, and light beam controlling devices. The perspective of micro/nano scale monolithic integration of optical devices and electronic devices...
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