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This paper presents the design of a novel microelectromechanical system (MEMS)-based total phosphorus (TP) microsensor with a microdigestion system. Cobalt metal film is introduced as the sensing material of the microelectrodes, and a micro digestion bioreactor is used as the microdigestion unit. The sensing mechanism of the cobalt electrodes to the concentration of phosphate ions is demonstrated...
The mechanical properties of carbon nanotubes have been widely employed to enhance the performance of atomic force microscopy (AFM) cantilever tips. Utilizing the electromechanical properties of carbon nanotubes, this paper investigates the potential of using carbon nanotubes as active strain sensing elements on AFM cantilevers. A batch microfabrication process was developed to construct silicon microcantilevers...
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