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Tetrahedral amorphous carbon (ta-C) film was deposited on silicon coupons using a Filtered Cathodic Vacuum Arc system with a pre-implantation process, and then was investigated by some systematic analyses. The ta-C film shows a very smooth surface morphology and a dense cross-section texture, along with a gradient interlayer, about 0.5 μm between the substrate and ta-C film, also has a board distribution...
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