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Threshold voltage ($\text{V}_{\text{TH}}$ ) needs to be well controlled to determine the switching point of the transistors. However, $\text{V}_{\text{TH}}$ variation was observed on high voltage transistor during development phase. Investigations show that the $\text{V}_{\text{TH}}$ variation was caused by phosphorus contamination from wafer backside. Various wet chemical cleaning methods were...
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