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In2O3 thin films were grown from a newly developed, liquid, homoleptic, In-based complex, tris(1-dimethylamino-2-methyl-2-propoxy)indium [In(dmamp)3], and O3 by atomic layer deposition (ALD) at growth temperatures of 150–200°C. In(dmamp)3 exhibited single-step evaporation with negligible residue and excellent thermal stability between 30 and 250°C. The self-limiting surface reaction of In2O3 during...
Novel tin complexes stabilized by alkoxy-functionalized oxime ligands [Sn(L1)2]2 (1) and [Sn(L2)2]2 (2), were prepared and characterized. Single-crystal X-ray diffraction analysis revealed that the complexes were obtained as dimers in which the tin metal centers are bridged by a pair of μ2-oxygen atoms. Due to the ligand steric effects, the metal centers in these complexes adopted an unusual distorted...
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