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Amorphous composite films, composed of a Ti 1−x V x O 2 solid-solution phase and a V 2 O 5 phase, were produced by chemical bath deposition and subsequently air-annealed at various temperatures up to 550°C. The microstructure and chemical composition of the as-prepared and annealed films were investigated by a combinatorial experimental approach using Scanning...
Titania thin films were prepared on bare Si and Pt/Ti/SiO 2 /Si substrates by chemical bath deposition (CBD) from solutions of a titanium peroxo complex and subsequent calcinations at 350 and 700 °C, respectively. The CBD process allowed deposition on both uncoated and metal-coated Si substrates with the same deposition rate. Optimization of the annealing process yielded uniform and crack-free...
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