The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
A type of NEMS double Si3N4 resonant beams pressure sensor is presented in this paper. The maths models are established in allusion to the Si3N4 resonant beams and pressure sensitive diaphragm. Based on the maths model of Si3N4 resonant beams, the relation between the resonant frequency and key dimensions of Si3N4 resonant beams is analyzed. Based on the maths model of pressure sensitive diaphragm,...
A structure of TiN double resonant beams pressure sensor is presented, the pressure is measured through the relation between the resonant frequency of TiN resonant beams and the measured pressure. In this paper, the maths model of sensitive structures of the resonant sensor is established, through the analysis and numeration from the theory, and simulation by the ANSYS software, the varied extension...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.