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The thermal stability of a Ge2Sb2Te5 chalcogenide layer in contact with titanium and titanium nitride metallic thin films has been investigated mainly using x-ray diffraction and elastic nuclear backscattering techniques. Without breaking vacuum, Ti and TiN have been deposited on Ge2Sb2Te5 material using magnetron sputtering. Thermal treatments have been performed in a 10−7 mbar vacuum furnace. On...
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