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This paper describes the design, fabrication, and characteristics of micro heaters mad on AlN (0.1μm)/3C-SiC (1μm) suspended membranes using surface micromachining technology. 3C-SiC and AlN thin films, which have a large energy band gap and very low lattice mismatch, were used for high-temperature environments. A Pt thin film was used as micro heaters and temperature sensor materials. The resistance...
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