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Two dimensional standards are important materials which are used in the calibration and the verification of coordinate measuring machines. In several countries, the national metrology institutes or accredit laboratories provide the calibration services of the two dimensional standards such as ball plates, hole plates and grid plates. The metrological equivalence of the measurement standards among...
The four path laser interferometer has been used for calibration of step gauge. Preceding studies adopting four path laser interferometer have achieved the expanded uncertainty of about 0.5 μm for 1000 mm. On the other hand, there is a concern remained that the alignment procedure seems to be tedious and the resulted uncertainty estimation becomes an empirical one. The current study aims to build...
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