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Study of the tungsten filament alloying processes with different precursor molecules shows that silicidation occurs when using silacycobutane (SCB) and carburization with 1,1,3,3-tetramethyl-1,3-disilacyclobutane (TMDSCB). The difference in the decomposition chemistry with the two molecules is responsible for the observation. Comparison of the depth profile and temperature distribution of the Si or...
The gas-phase chemical species produced from both the direct decomposition of 1,1,3,3-tetramethyl-1,3-disilacyclobutane (TMDSCB) on a tungsten filament and the secondary reactions in the HWCVD reactor were identified by vacuum ultraviolet laser single-photon ionization coupled with time-of-flight mass spectrometry. TMDSCB decomposes on the filament to methyl and 1,1,3-trimethyl-1,3-disilacyclobutane-1-yl...
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