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We investigated the strain and surface structural properties of a strain-relaxed Si1–xGex alloy layer with high Ge-content using optical surface second-harmonic generation. Here, the Si1–xGex alloys are heteroepitaxial, and they are deposited onto Si substrates via ultra-high-vacuum-chemical vapor deposition. The in-plane strain and the composition $x$ of the Si1–xGex alloys were determined using...
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