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The paper presents an analysis of self-heating effect on micro-machined temperature difference air flow sensor, and demonstrates through modeling and simulation that self-heating effect can influence the output of the air flow sensor. The mathematical model of the sensor based on an existing microsensor chip is set up, and some details of the chip structure are considered in the model. The sensor's...
The paper presents an analysis of self-heating effect on micro-machined temperature difference air flow sensor, and demonstrates through modeling and simulation that self-heating effect can influence the output of the air flow sensor. The mathematical model of the sensor based on an existing microsensor chip is set up, and some details of the chip structure are considered in the model. The sensor's...
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