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If a pipe end is faced at a piston-vibrating surface with a small gap in liquid, the liquid is suctioned into the pipe. The present ultrasonic pump is based on this phenomenon to induce flow. For a low-profile configuration, we introduce a 30-mm-diameter bending disk driven by a ring-shaped PZT element bonded on the back of the disk. The disk vibrator is softly supported by frames via O-rings at its...
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