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This paper reports a microelectromechanical systems (MEMS)-based microgripper, integrating two-axis actuators and force sensors, for microscale compression and shear testing of soft materials. The device employs V-beam electrothermal actuators to drive an active gripping arm and compress or shear a microscale sample grasped at the gripping tips, and two triplate differential capacitive sensors to...
This paper presents a MEMS device for simultaneous mechanical and electrical characterization of individual nanowires. The device consists of an electrostatic actuator and two capacitive sensors, enabling it to acquire all mechanical measurement data (force and displacement) electronically without relying on electron microscopy imaging. Electrical insulation within the suspended structures of the...
This paper presents a MEMS (microelectromechanical systems) device for tensile testing of individual one-dimensional nanomaterials. Consisting of capacitive force and displacement sensors and an electrostatic actuator, the device conducts tensile testing and electronically measures nanomaterial deformations and forces. Electronic measurement permits a higher data sampling rate than electron microscopy...
Nanomanipulation in space-limited environments (e.g., inside SEM, and particularly in TEM) requires small-sized nano manipulators that are capable of producing sub-nanometer positioning resolutions and large output forces. This paper reports on a millimeter-sized MEMS (microelectromechanical systems) based nano manipulator with a positioning resolution of 0.15 nm and a motion range of plusmn2.55 mum...
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