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Surface acoustic wave (SAW) sensors based on Co 3 O 4 /SiO 2 composite sensing films for ammonia detection were investigated at room temperature. The Co 3 O 4 /SiO 2 composite films were deposited onto ST-cut quartz SAW resonators by a sol–gel method. SEM and AFM characterizations showed that the films had porous structures. The existence of SiO ...
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