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This paper analyzes the effects of small lot manufacturing (SLM) on equipment operation and fab performance. It also discusses equipment front-end design challenges and describes options for carrier handling and AMHS operation to maximize the productivity benefits of small lot manufacturing. This paper focuses primarily on the material handling aspects of SLM and as such, does not discuss the influences...
Line balance and tool throughput are two important, yet conflicting goals. Especially for cascading tools supporting multiple layers in the line, there has to be a trade off between these two optimization criteria. Short cascades are optimal for line balancing, but this strategy leads to lower tool throughput. The size of the negative throughput impact is even stronger when tools require setup times...
Short cycle times are critical to the success of semiconductor manufacturing. The addition of more and more mask layers leads to higher raw process times and makes short cycle times an increasingly challenging task. One cycle time reduction possibility semiconductor manufacturers now look at is lotsize reduction. A reduction in lotsize transfers directly into lower raw process times. Modeling and...
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