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This paper presents a simple and robust process for fabrication of functional electrostatic RF-MEMS switching devices with lifetimes easily exceeding 10 8 cycles by unipolar actuation at 100Hz. The device implements a switchable air gap capacitor and is therefore not limited in lifetime by dielectric charging as opposed to contact-type capacitive switches implementing high-k dielectrics. Even...
This paper presents a novel electrostatic actuator using fringing fields as actuation mechanism, ie electrostatic fringing-field actuator or EFFA. The novel device is produced on an insulating substrate in a simple 2-mask process involving only one sacrificial layer and one metallisation. As a proof of concept, we produced and characterized EFFA-based tuneable RF devices and circuits in various technological...
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