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Doping of TiO2 with various metal ions can modify its different properties. In this work, structural properties of transparent Tb-doped TiO2 thin films have been outlined. Thin films were deposited by high energy reactive magnetron sputtering (HE RMS) from metallic Ti-Tb target on Si and SiO2 substrates. Thin films were investigated by means of energy disperse spectrometry (EDS), X-ray diffraction...
Transparent oxide semiconductors (TOSs) based on TiO2-doped matrix have been recently studied for their possible microelectronics applications. In the present work, TiO2 and Hf-doped TiO2 thin films were prepared by low pressure hot target reactive magnetron sputtering (LP HTRS) and deposited onto monocrystalline (100) silicon substrate. After deposition thin films were additionally annealed in air...
The presentation reports on transparent titanium oxide thin film and its photonic applications. Optical transmission and optical beam induced current (OBIC) measurements are presented
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