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This paper describes a high signal-to-noise ratio capacitive sensing circuit topology based on a capacitive feedback charge amplifier with high power and area efficiency. When the circuit is used in an audio MEMS sensor, 78.6dB SNR in audio band is measured with less than 0.5 muW power consumption. With a MOS-BJT pseudo-resistor feedback scheme, this topology has also been applied to a capacitive...
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