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In a country where labor supply and cost continue to be a challenge, automation is the answer to efficient manufacturing. It brings about higher productivity and also other benefits like cycle-time improvement, quality assurance, etc. In GLOBALFOUNDRIES Singapore, we embark on a revitalization journey of the matured 200mm fabs through the introduction of Autonomous Mobile Robots and system enhancement...
Aerosol deposition (AD) method is technique for forming high-density ceramic films on substrate material surface at ambient temperature. The Y2O3 film formed by AD method has high density and nanocrystalline structure that crystallite size is under 20 nm. AD Y2O3 film has been used for plasma resistance coating and has helped to reduce the generation of particles in plasma etching process. We investigated...
Diffusion behavior of mobile ions in the memory device was successfully visualized as 3D mapping by using ToF-SIMS. In order to realize, we were mainly prepared two kinds of samples. One is a sample written a simple stripe pattern, the other is a sample written a stripe pattern with a density difference. By burning these samples, we were able to estimate the three-dimensional diffusion behavior of...
The improvement of interconnection technology is becoming a top priority for the operation of high power devices such as SiC at higher temperatures. We proposed a interconnection method using Nickel Nano-particles direct bonding to form bonds between the chip electrodes and substrates. SiC devices assembled with the Ni bonding interconnection were confirmed to be operated successfully in a high temperature...
As features sizes continue to decrease, process control has become essential to control profile and Critical Dimension (CD) uniformity across the wafer. In order to reduce the CD of the Shallow Trench Isolation (STI) process, we propose a method to model the plasma etch process of the STI module in CMOS technology by integrating a Feedback R2R control loop and inline scatterometry measurements.
This case study describes a staffing modeling method developed by The MAX Group for increasing direct labor personnel productivity through providing a complete representation of how the operators work, how effective they are and how to optimize their assignments. This modeling technique combines two important aspects together which uniquely addresses Fab management concerns about speed of execution...
This paper introduces a systematic management procedure of Make-to-order (MTO) production system including Make-to-stock (MTS) products. The newly developed MTO management system consists of capacity planning and production planning based on the optimized resource allocation and individual production orders or estimated orders. For semiconductor manufacturing, the optimal resource allocation during...
In this work, we focus on yield analysis task where engineers identify the cause of failure from wafer failure map patterns and manufacturing histories. We organize yield analysis task into 3 stages, failure map pattern monitoring, failure cause identification and failure recurrence monitoring, and incorporate machine learning and data mining technologies into each stage to support engineers' work...
Test quality is critical to eliminate test escapes and achieve high-reliability large-scale integrated (LSI) devices. This paper proposes a new concept called the “physical test coverage” to verify test coverage based on the physical layout of LSI circuits. The physical test coverage is calculated from the ratio between the critical area of all wires in a device and that of wires undetected by LSI...
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