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We report on a novel methodology for fabricating multilayer, high aspect ratio, 3D microfluidic structures with through-layer vias that can be bonded between two hard substrates. It is realized by using a plastic plate embedded PDMS stamp in soft lithography to obtain flat and open PDMS structures that can be stacked to form multiplayer 3D microfluidic networks in high yield without severe structure...
A flexible implantable micro temperature sensor has been proposed and fabricated on a polymer capillary by surface micromachining. The dynamic temperature response of the sensor when used in the hyperthermia is simulated and analyzed. The micro sensor has been successfully fabricated by our developed cylindrical projection lithography system. Platinum film is used as the sensing element material considering...
In this paper, we develop a strong surface-enhanced-Raman-Scattering (SERS) sensor by sandwiching dual gold nanoparticle (GNPs) on single layer graphene (SLG) for biomolecule detection. It's a simple and high-throughput technique for producing GNPs sandwiched on SLG nano structures. The overall nanostructure size can be smaller than 10 nm which is more suitable for individual biomolecule sensing.
Conventional diagnosis based on ensemble measurements often overlooks the variation among cells. Here, we present a droplet-microfluidics based platform to investigate single cell activities. Adopting a previously developed isothermal rolling circle amplification-based assay, we demonstrate detection of enzymatic activities down to the single cell level with small quantities of biological samples,...
To date, 25 million deaths have been caused by human immunodeficiency virus (HIV) infections. However, the lack of effective vaccines and drugs still leads to a high transmission rate of HIV. It was estimated that 2.7 million new infections occurred in 2011. Early and accurate diagnosis is essential to control the HIV transmission. Thus, many efforts have been made to explore a rapid and accurate...
In this paper, we successfully developed a fuel-self-propelled reaction device without consuming any external source of energy for passive micro direct methanol fuel cell (μDMFC) anodes by using the physical phenomenon of surface tension through three-type micro fluidic structures. Firstly, to prevent the backflow of fuel from the reaction zone due to generated gas pressure, highly dense micro-channels...
This paper reports a low-cost fabrication method for mass production of free standing cyclic olefin copolymer (COC) membranes embedded with micro pore arrays. We show that the method creates suspended membranes with thickness of 2μm and micro pores having diameter ranging from 3–5μm. We integrated the membrane in a microfluidic system designed to mimic the endothelial barrier in bone marrow sinusoids...
Gene transfection plays an important role in biological researches, especially in the development of induced pluripotent stem cells (iPS). In this work, an optically-induced electroporation method for gene transfection by using a microfluidic platform was presented. Electroporation can be induced by illuminating an optical image on a photoconductive layer when the top and the bottom substrates were...
Transmembrane proteins functioning as the cellular signaling gateway are the major molecular targets of commercial drug therapy. HEK293T cells are world widely used cell based-platform for these proteins analysis. We loaded the photo-curable hydrogel into the HEK293T cells, treated with UV through the micron photo-mask, and fabricated the cell membrane fiber. The activity of ion channels on the surface...
This paper presents an optical force driven nano-machined actuator and the “pull-back” effect of a free-standing arc in an opto-mechanical ring resonator system. This nano-actuator obtains a maximal central displacement of 43.1 nm, with an actuation resolution of 0.28 nm, via tuning the wavelength of the control light at a fixed optical power of 2.8 mW. The “pull-back” effect occurs at the maximal...
The polarization of electromagnetic (EM) wave plays an essential role in the application of optoelectronics, life science microscopy and photographic display[1]. The conversion of EM wave in one polarized direction to its orthogonal direction is usually quite weak in natural materials. This paper presents a tunable metamaterial which rotates the polarized direction up to 20° in THz regime. The metamaterial...
This paper demonstrates a novel concept for the shock protection of MEMS suspensions: solder is incorporated within the sidewalls of the suspension to produce protective armouring. This provides solder-solder contact at the extremes of the suspension travel, greatly increasing the shock resistance. Model suspension systems were fabricated using deep reactive ion etching (DRIE) and shock tested in...
We propose an electrostatically actuated spiral structures as a metamaterial for circularly polarized light in Terahertz (THz) frequency. Actuation of the spiral structures changes their geometry, and produces a tunable chirality resulting in circular dichroism, which is the differential absorption between the left and right circularly polarized light. Results of the THz-spectroscopy confirmed that...
In this study, a novel planar inductor to detect the pressure sensor is proposed. The planar inductor consists of planar coil and CoFeB films. The proposed sensor exploits the inverse-magnetostriction effect to change the permeability of the CoFeB film by pressure load. This permeability variation will further result in the inductance difference of the planar inductor. Consequently the relationship...
This paper reports on the first demonstration of an ultra-miniaturized, high frequency (215 MHz) and high sensitivity MEMS resonant magnetic field sensor based on an AlN/FeGaB bilayer nano-plate resonator capable of detecting magnetic field at nano-Tesla level. Despite of the reduced volume and the high operating frequency of the sensor, high electromechanical performances were achieved (quality factor...
This paper reports on solid UV cross-linked Poly(ethylene)-glycol-diacrylate (PEGDA) as a material for microfluidic devices for biological applications. We have evaluated biocompatibility of PEGDA through two separate means: 1) by examining cell viability and attachment on cross-linked PEGDA surfaces for cell culture applications, and 2) by determining if cross-linked PEGDA inhibits the polymerase...
We have constructed world-first generalized model for expecting 3D curing characteristics of photocurable polymer including micro particles. First, our theory is applicable for all polymers that respond to light. Second, we can adapt all kinds of particles to our theory. Moreover, the complicated calculation is not necessary. We can expect 3D curing properties through characteristics of resin and...
Here we present a method to strongly reduce the oxidation of conductive polycrystalline silicon carbide (poly-SiC) layers. We employed a thin (45 nm) layer of aluminum oxide (Al2O3) as protective coating against oxidation. This layer was deposited by atomic layer deposition (ALD) to achieve a high quality and conformal coating. Microheaters made of nitrogen doped poly-SiC (poly-SiC:N) were oxidized...
This paper reports a micromachined corona discharger with slit dielectric barrier for measuring the number concentration of airborne particle. The tip-to-plate corona discharger presented in our previous research only generates the corona discharge on the tip type electrode. However, the proposed corona discharger generates the corona discharge on the slit dielectric barrier as well as the tip type...
We present an adaptable test-bed for characterization of 3-D micro-wineglass resonators. The test-bed provides two interchangeable modes of excitation: (1) Mechanical pinging using a piezo actuated probe assembly, (2) electrostatic excitation using assembled electrode structures with < 20 μm capacitive gaps. Two modes of detection is also available: Optical pick-up using laser Doppler vibrometry...
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