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This paper describes a centimeter-sized flexible multi-electrode array (MEA) integrated with a neuronal spheroid (neurospheroid) array. The MEA has a number of neurospheroids and can be applied to extensively curved surfaces (e.g., brain). We demonstrated that MEA successfully activated neurons within a neurospheroid on the microelectrode array. In addition, the MEA was used to activate 2D culture...
We introduce starch as a new material for MEMS applications, especially in biomedical areas. Starch can be used for micromachined sensors and actuators that need non-electrically triggered and driven actuation or release mechanisms (e.g., stents, valves, one-time release devices) or temporary stiffening of flexible needles for implantation (e.g., flexible neural probes). Our experiments show that...
Phase change materials are attractive candidates for use in ohmic switches as they can be thermally transitioned between amorphous and crystalline states, showing several orders of magnitude change in resistivity. Phase change switches are fast, small form factor, and can be readily integrated with MEMS and CMOS electronics. As such, they have a great potential for implementing next-generation high-speed...
This paper reports, for the first time, on the design, fabrication, and measurement of piezoelectric nano-actuators and novel stress-compensating NEMS switches based on 10–25 nm thick aluminum nitride (AlN) films. These ultrathin, highly c-axis oriented, and low-stress AlN films were synthesized over very thin platinum layers using reactive sputtering. The extracted d31 piezoelectric coefficients...
This paper introduces a novel energy harvesting technique and an associated packaged device aimed at powering intracardiac active medical devices by scavenging energy from ordinary blood pressure variations. We present the innovative concept of a micro-bellows packaged implant that deforms due to cyclic blood pressure variations in the cardiac cavities. This bellows transmits stresses on a spiral-shaped...
We report a new silicon MEMS accelerometer based on differential Frequency Modulation (FM) with experimentally demonstrated self-calibration against dynamic temperature environment and μg-level Allan deviation of bias. The sensor architecture is based on resonant frequency tracking in a vacuum packaged SOI tuning fork oscillator with a high Q-factor. The oscillator is instrumented with a DC voltage...
A compact suspension-structure is on-chip integrated surrounding to a piezoresistive pressure sensing diaphragm for elimination of packaging-stress induced instability. The novel technology is named by us as PS3 (Packaging-Stress Suppressed Suspension). Using one single-side polished wafer and micromachining process only from the front-side, the cantilever-like PS3 structure is formed compactly around...
We present a handheld, biomolecular detector based on a cell phone platform. This prototype integrates a conventional smart phone with a custom electrical circuit and a microfluidic chip, which enables a portable, lightweight biodetection system. An electrochemical detection scheme is utilized, allowing for rapid (< 20 min), high sensitivity, analytical measurements. As proof of concept, Plasmodium...
We have developed a novel three dimensional tactile sensor based on vertically aligned carbon nanotubes. The carbon nanotubes were directly synthesized on silicon microstructures and these CNTs-on-microstructures were integrated to flexible polydimethylsiloxane layers. Each tactile sensor has four sensing parts and the direction of force can be detected by monitoring the increase or decrease of electrical...
For high-speed adhesion-based cell separation, we propose a new cell-motion model including the shear-induced lift force, with which the cell motion at high flow velocities can be analyzed. Also, we have developed a novel sub-micron-accuracy measurement method of the three-dimensional position of cells. We have clarified the effect of the shear-induced lift force on the cell motion near adhesive walls...
We propose a highly sensitive three-dimensional tactile sensor using the structure of elastic micro pyramids pressing on piezoresistive cantilevers. In the structure of the sensor we proposed, the forces acting on the surface of the elastomer were transmitted to the cantilevers through the pyramids. The key point of our sensor was that the cantilevers were not completely embedded inside the elastomer:...
We have investigated the mechanism of a bristled wing of thrips by using an artificial cantilever-based wing. Five kinds of the artificial bristled wing, which had the similar size of the thrips wing, with a different hair gap were evaluated in a wind tunnel. Experiment results suggested that at low hair-gap-based Reynolds number (<10), the bristled areas of the wing acted as an imaginary airflow...
This paper reports on the design, implementation and characterization of triaxial capacitive accelerometers operating in a low-pressure environment (∼1 Torr). Small form-factor devices, with proof-mass area of less than 1mm2, were fabricated on a 40 μm-thick SOI substrate using the HARPSS™ process to attain in-plane and out-of-plane nanoscale capacitive airgaps (∼300 nm). Increased sensitivity and...
This paper adopts the design strategies involved in the biological flow sensors present on the body of the blind cave fish in order to engineer MEMS artificial flow sensors by employing micro/nano fabrication technologies. The MEMS sensor developed consists of Si60 polymer haircells fabricated by stereolithography. Biomimetic cupular fibrils are developed by electrospinning a solution of polyL-lactide/e-caprolactone...
We propose a muscle based bioactuator that can be driven in air. As the driving force of this actuator, we mounted aligned muscle fiber sheets between poles, with gold electrodes located at the edges of the muscle fibers to stimulate them. The muscle fibers are in a hollow space covered by a collagen structure to preserve the actuating properties in a wet condition. In the experiments, we prove that...
Parylene C neural probes with a 3D sheath structure are introduced as a novel interface for long-term intracortical neural recording. 3D sheath structures were assembled from surface micromachined Parylene microchannels by thermoforming the thermoplastic around a solid microwire mold. Multiple Pt electrodes lined the interior and exterior of the sheath. Electrochemical characterization of the electrodes...
This paper presents a technique for the characterization of single-cell electrical properties (specific membrane capacitance and cytoplasm conductivity) at a speed of 5–10 cells per second (vs. minutes per cell using existing techniques). When a cell flows through a microfluidic constriction channel, electrical impedance at multiple frequencies is measured. Electrical and geometrical models were developed...
Here we report vertical metal/silicon dioxide (SiO2) multiwalled microtube arrays as electrical and optical neuroprobes for “optogenetic”. Three-dimensional metal/SiO2-microtube arrays can be fabricated by vapor-liquid-solid (VLS) growth of silicon-wire, followed by the SiO2/metal depositions and the core-silicon etching. As the inside metal, we use iridium (Ir) with a low electrical electrolyte/electrode...
We newly propose a microfluidic device with multiple functions for simple microvascular connection. By using this microfluidic device with suction mechanism, we can operate the blood vessels in a single device for assisting the microvascular connection procedure such as fixing the position of the blood vessels, expanding the diameter of the blood vessels, and pouring the adhesion and drugs. We have...
The highest reported sensitivity (35%) of DNA sieving by entropic trapping has been achieved with a low operation voltage of 8V, and short time of 6 minutes. Wafer scale fabrication of 3D artificial nano-channel matrices is based on proven NEMS, MEMS, and Through-Si-Via (TSV) semiconductor technologies and offers high potential for application in portable bioelectronic instruments. A mechanism based...
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