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Separations of complex proteomes are required to fractionate components before downstream identification and quantification of individual protein species. Twodimensional gels based on a combination of isoelectric focusing (IEF) and sodium dodecyl sulfate polyacrylamide gel electrophoresis (SDS-PAGE) have been a core technology for real-word detection of thousands of proteins, and microfluidic systems...
This article discusses anti-stiction coating with conductive self-assembled monolayer (SAM) for ohmic contact microelectromechanical system (MEMS) switches. As we reported in the previous study, capillary force is a dominant factor of stiction in the air, and a hydrophobic SAM and Au coating can reduce the capillary force by preventing the formation of the liquid meniscus. In this study, we measured...
Micromachined pyrolyzed polymer electrode is evaluated as 18F- deposition and recovery electrode toward positron emission tomography (PET) application for the first time. Electrical separation of 18F- from H218O water has been studied for a preparation of a PET probe. A typical deposition and recovery cell of 18F- is illustrated in Fig. 1. We propose pyrolyzed polymer electrode instead of conventional...
The paper is focused on the influence of packaging technologies on the performance of inertial MEMS sensors. System simulations of MEMS are vital to evaluate and optimize the interplay of transducer cells with the sensor electronics. Special emphasis must be put on packaging aspects in order to assess the impact of environmental and operating conditions on functional parameters as capacitance offset...
We present the novel use of a positive-tone photosensitive polyimide for the rapid production of grayscale features using a maskless lithography system including several sample geometries to illustrate the general capabilities of this method. Commonly used in the fabrication of MEMS and other micro-scale devices, polyimide films are known for their extreme mechanical and thermal stability. Unfortunately,...
This paper reports on an evaluation of the adhesion force between silicon and carbon nanotubes (CNTs), which were directly synthesized on a silicon substrate by chemical vapor deposition (CVD). CNTs bridging between silicon tips were pushed with a force-sensing cantilever to break the adhesion between silicon and CNTs. We measured the force acting on the cantilever at the moment of breaking the adhesion...
We present the technology for low substrate temperature (~400degC) growth of high-density, defect-free (without kinks and branches), unidirectional arrays of Si needles with positive profiles and sub-mum tips using selective vapor-liquid-solid (VLS) mechanism. The low substrate temperature allows possible integration with onchip CMOS circuitry or biomaterials with minimal thermal damage. The effect...
We demonstrate a new approach for large area releases in single crystal silicon without the use of traditional undercutting-based etches. Our approach uses silicon migration to create suspended microstructures by transforming periodic array of trenches into a continuous void under the silicon surface. We show close agreement between simulation of the silicon migration phenomenon and fabrication results,...
The following topics are dealt with: actuators; biosensors and biomicrosystems; chemical microsensor and microsystems; sensor materials, fabrication and packaging technology; mechanical/physical sensors and systems; medical microsystems; microfluidics; nanoscale materials and fabrication technology, devices and systems; optical MEMS; power MEMS; RF MEMS, resonators and oscillators; cell manipulation...
In this paper, the strongest yet latchable valve in sub-cm3 size for microfluidic applications is presented. The device has an integrated actuator cavity consisting of three segments filled with paraffin and operated by separate heaters. At one of the segments, a membrane valve head is deflected from the expansion of the resistively melted paraffin to close against its valve seat. Different heating...
This paper demonstrates a dry heterogeneous integration process for embedding CMOS chips into a partially-complete MEMS silicon wafer. By using standard IC processing, we create passive alignment structures in backside cavities on the MEMS wafer. The precision dry assembly utilizes front-to-front registration, removing the need for sidewall slope control of the backside Deep Reactive Ion Etch (DRIE)...
Strength and fatigue lifetime of polycrystalline silicon thin films with notches were successfully predicted from the information obtained from reference specimens with uniform stress distribution. The initial damage, which was induced by patterning process and supposed to be independent of specimen shapes, was characterized as an equivalent crack distribution from the strength distribution of reference...
This paper reports a simple fabrication approach to create microstructures in electrospun polymer nanofibers. A collector chip with micropatterned electrodes generates electromechanical energy wells above the substrate, which induce selective patterning of polymer nanofibers on the collecting surface. This work provides a sound technology to interface electrospun nanomaterials to larger scaled structures...
We report a thermodynamically-stable Ti/TaSi2/Pt Ohmic contact on n-type, heavily-nitrogen-doped low-pressure chemical vapor deposited polycrystalline 3C-silicon carbide; this Ohmic contact metallization is suitable for stable high temperature operation. The contact shows excellent linearity and has a specific contact resistance (SCR) as low as 2times10-5 Omega-cm2, directly after sequential sputtering...
This paper reports a newly developed z-axis capacitive accelerometer with high durability to impacts. Our accelerometer has a unique sensing mechanism by which the displacement of an inertial mass caused by an acceleration in the z-axis direction is converted into the rotational displacement of a pair of detection plates. Our accelerometer has a high degree of design freedom in terms of selecting...
Applications where a microsystem has to interface with the outside world are often face the rather small force output or stroke that a typical microfabricated actuator can generate. However, microscale piston-cylinder pneumatic or hydraulic actuators offer a significant improvement of the stroke and force output of microactuators. For the first time, a process is presented that enables batch fabrication...
This paper reports on the development of a new integrated laser Doppler blood flow microsensor and its application for monitoring the blood flow of chickens as an important factor in preventing avian influenza infection. To enable the attachment of the blood flow sensor to chickens without making the attachment felt, we have developed the world's smallest size (1/1000 the weight of a commercial blood...
Stiffness information is one of the important factors to naturally and intuitively interact with electronic devices and displays. For small-sized electronics, such as hand-held devices, the size of haptic modules is a key limiting factor, and it must be minimized. This paper proposes a concept of miniature and tunable stiffness display an aim to design a miniature device conveying stiffness information...
We demonstrate optofluidic packaging of silicon microchips using image processing-based optofluidic maskless lithography (IP-OFML). Optofluidic maskless lithography (OFML) is a dynamic photopolymerization technique for free-floating microstructures within a fluidic channel using a MEMS spatial light modulator. OFML via computer vision-aided image processing enables individual polymer packaging of...
We report high-quality factor (e.g., more than 6,000) silicon resonators operating at high frequencies (~130 MHz) based on phononic crystals which are a new class of materials with artificially-engineerable phononic (or acoustic) properties. The resonators use the complete acoustic (or phononic) band gap of the designed crystal and are fabricated using a CMOS-compatible micromachining technology....
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